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I. Basic Properties and Structure

Chemical formula and name: The chemical formula is CF₄, which can be called tetrafluorocarbon or tetrafluoromethane.

Material category: It can be regarded as both a halogenated hydrocarbon (organic compound) and an inorganic compound.

Physical properties: At normal temperature and pressure, it is a colorless, non-flammable gas that does not dissolve in water but is soluble in benzene and chloroform.

II. Stability and Reaction Risks

Extremely stable: It is one of the most stable organic compounds. Even at a high temperature of 900°C, it does not react with metals such as copper, nickel, tungsten, and molybdenum, and will only slowly decompose at the carbon arc temperature.

High temperature and high pressure risks:

Decomposition of toxic substances: When burning with combustible gases, it will decompose and produce toxic fluorides.

Physical explosion risks: At high temperatures, the pressure inside the container will increase, and there is a risk of cracking and physical explosion.

III. Main Applications

Electronic industry: Primarily used in plasma etching processes for various integrated circuits.

Other applications: Also used as laser gas, cryogenic refrigerant, solvent, lubricant, insulating material, and coolant for infrared detection tubes.

IV. Safety Storage Requirements

Storage environment: Stored in a cool, ventilated, non-flammable gas-specific warehouse. The warehouse temperature should not exceed 30℃. Isolation storage: Should be stored separately from flammable (or combustible) substances and oxidants. Avoid mixed storage.

Risk avoidance: Keep away from fire sources and heat sources.

Emergency preparedness: The storage area should be equipped with leak emergency handling equipment.

CAS NO

75-73-0

UN NO

1982

EINECS NO

Molecular weight

88

Appearance

Colorless, Odorless

Melting point

-184 ℃

Boiling point

-128.1 ℃

Density

3.72 kg/m³

DOT Class

2.2

Label

Non-flammable Gas

Industrial Grade

Specification99.999%

Oxygen + Argon

≤ 1 ppm

Nitrogen

≤ 2 ppm

Hydrogen

≤ 0.3 ppm

Carbon Monoxide

≤ 0.3 ppm

Carbon Dioxide

≤ 0.3 ppm

Sulfur Hexafluoride

≤ 0.3 ppm

THC

≤ 0.3 ppm

Trifluoromethane

≤ 0.3 ppm

OFC

≤ 1 ppm

Moisture

≤ 1 ppm

Acidity as HF

≤ 0.1 ppm

Package Information

Cylinder CapacityValveWeight

47L

CGA580

30kgs